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What is EDX (Energy Dispersive X-Ray Spectroscopy)?

EDX systems are attachments to Electron Microscopy instruments (Scanning Electron Microscopy (SEM) or Transmission Electron Microscopy (TEM) instruments where the imaging capability of the microscope identifies the specimen of interest. The data generated by EDX analysis consist of spectra showing peaks corresponding to the elements making up the true composition of the sample being analyzed.


In a multi-technique approach EDX becomes very powerful, particularly in contamination analysis and industrial forensic science investigations. The technique can be qualitative, semi-quantitative, quantitative and also provide spatial distribution of elements through mapping. The EDX technique is non-destructive and specimens of interest can be examined in situ with little or no sample preparation.